Application of linear chain carbon films for sensitive elements of humidity sensors

doi:10.18721/JPM.163.126

St. Petersburg Polytechnic University Journal - Physics and Mathematics Peter the Great St. Petersburg Polytechnic University

Since 2008

ISSN 2304-9782

ISSN 2618-8686

ISSN 2405-7223

Year: 2023 Volume: 16 Issue: 3.1

Pages: 479

668 54887

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UDK: 551.508.7

DOI: 10.18721/JPM.163.126

Article type: Conference Report, Theses of Report

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Application of linear chain carbon films for sensitive elements of humidity sensors

Condensed matter physics

Authors:

Tyunterov Evgeny S. Vasilyeva Olga V. Ksenofontov Sergey I. Lepaev Alexander N. Smirnov Alexander V. Abrukov Victor S. Platonov Pavel Anufrieva Darya A. Kokshina Anna V. Kazakov Valery A. Petrov Dmitry V.

Abstract:

The technologies for synthesizing and the results of investigating novel relative humidity sensors are described. Films made of various metals in combination with linear-chain carbon films were used as electrodes. The study presents the results of testing the sensors for sensitivity and recovery time. Multifactor computational models were created using neural networks based on the obtained data to solve both direct and inverse experimental problems.