Features of the formation super C45-RuO2-based planar supercapacitor structures

A method for forming electrodes of a planar supercapacitor based on Super C45 and RuO2 by electrophoretic deposition is considered. The possibility of controlling the sediment composition by changing the composition of the initial suspension is shown. The suspension was subjected to dispersion, after which electrophoresis was performed in an electrophoretic cell consisting of two electrodes and a power source. The features of electrophoretic deposition
and the influence of the main technological regimes on the morphology and composition of the formed layers of electrode materials are considered. A technological route was developed for manufacturing prototypes of planar supercapacitors using laser engraving to apply a topological pattern. The dependence of the specific capacitance on the electric field strength during electrophoretic deposition has been studied. Thus, it became possible to create designs of planar supercapacitors for a wide range of applications in microelectronics.