Relation between plasma parameters of the transversal capacitively coupled rf discharge in the narrow capillary and its radiophysical characteristics

Gas discharge and plasma physics

The existing one-dimensional simple model of transversal RF discharge, valid for the plane geometry, is modified for two-dimensional discharge in a narrow dielectric capillary with circular cross section placed between two plane-parallel electrodes. The quantitative relation between the absorbed RF power in plasma and absolute values of electron density and plasma electric field is deduced. Some results of experimental data processing for discharge in the mixture of Kr (8 Tor) and СЬ (2 Tor) are presented.