SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal - Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
en Английский
Version for the visually impaired
Submit Your Paper
Publication schedule
  • №1 March 2023
    Submission deadline: 20 January 2023

Articles by keywords "silicon nitride and silicon oxide films"

A formation method of amorphous and crystalline silicon nanoclusters in dielectric films

Atom physics and physics of clusters and nanostructures
Korchagina T.T. Volodin V.A.
  • Year: 2010
  • Issue: 1
  • 0
  • 4265
  • Pages: 66-71