Articles by keywords "multilayer membrane"
Effect of internal mechanical stresses in a multilayer structure on displacement for various designs of microelectromechanical membranes
- Year: 2024
- Volume: 17
- Issue: 3.2
- 4
- 477
- Pages: 121-124
SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics
Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223