SPbPU Journal - Physics and Mathematics
    St. Petersburg Polytechnic University Journal: Physics and MathematicsPeter the Great St. Petersburg Polytechnic University
    Since 2008
    ISSN 2304-9782
    ISSN 2618-8686
    ISSN 2405-7223
    enАнглийский
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    Articles by keywords "ion etching"

    E-beam resist AR-N 7520 in the formation of the photonic structures

    Physical materials technology
    Fetisenkova K.A.Melnikov A.E.Miakonkikh A.V.Rogozhin A.E.Tatarintsev A.A.
    • Year: 2024
    • Volume: 17
    • Issue: 3.1
    • 20
    • 3529
    • Pages: 278-282

    Modification of glass surface by a high electric field

    Physical materials technology
    Babich E.S.Reduto I.V.RedkovReshetov I.V.Zhurikhina V.V.Lipovskii A.A.
    • Year: 2020
    • Volume: 13
    • Issue: 4
    • 57
    • 8274
    • Pages: 176-184