SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
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Articles by keywords "ion etching"

E-beam resist AR-N 7520 in the formation of the photonic structures

Physical materials technology
Fetisenkova K.A. Melnikov A.E. Miakonkikh A.V. Rogozhin A.E. Tatarintsev A.A.
  • Year: 2024
  • Volume: 17
  • Issue: 3.1
  • 14
  • 2536
  • Pages: 278-282

Modification of glass surface by a high electric field

Physical materials technology
Babich E.S. Reduto I.V. Redkov Reshetov I.V. Zhurikhina V.V. Lipovskii A.A.
  • Year: 2020
  • Volume: 13
  • Issue: 4
  • 56
  • 7473
  • Pages: 176-184