SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
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Articles by keywords "high-power impulse magnetron sputtering"

Novel methods for synthesizing high-quality thin films through short and ultrashort high-power pulsed magnetron sputtering

Condensed matter physics
Kozhevnikov V.Yu. Oskirko V.О. Rabotkin S.V. Pavlov A.P. Semenov V.A. Soloviev A.A. Grenadyorov A.S. Zakharov A.N.
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 11
  • 2559
  • Pages: 26-30