Articles by keywords "actuation voltage"
Performance optimization of the cantilever-based MEMS switch
- Year: 2022
- Volume: 15
- Issue: 3.2
- 31
- 3406
- Pages: 140-144
SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics
Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223