SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
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Articles by keywords "actuation voltage"

Performance optimization of the cantilever-based MEMS switch

Physical electronics
Belozerov I.A. Uvarov I.V.
  • Year: 2022
  • Volume: 15
  • Issue: 3.2
  • 33
  • 4761
  • Pages: 140-144