Articles by keywords "ANSYS Fluent"
Study of the effect of dynamic and temperature inhomogeneities on epitaxial processes in a horizontal CVD reactor
- Year: 2023
- Volume: 16
- Issue: 1.1
- 17
- 3252
- Pages: 336-340
SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics
Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223