SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
en Английский
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Author A.S. Ivanov
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A.S. Ivanov
A.S. Ivanov

A fast-operating interferometry device for measuring films thickness over the range from ten to one thousand microns

Experimental technique and devices
Gonchar I.V. Ivanov Alexey S. Fedortsov A.B.
  • Year: 2012
  • Issue: 3
  • 0
  • 8874
  • Pages: 48-55