Technological process of manufacturing a gas-sensitive multisensor chip based on a passivating coating of zinc oxide nanorods obtained by thin-film technology

doi:10.18721/JPM.183.137

St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University

Since 2008

ISSN 2304-9782

ISSN 2618-8686

ISSN 2405-7223

Year: 2025

Volume: 18

Issue: 3.1

Pages: 319

205

1937

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UDK: 621.794.47

DOI: 10.18721/JPM.183.137

Article type: Conference Report, Theses of Report

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Technological process of manufacturing a gas-sensitive multisensor chip based on a passivating coating of zinc oxide nanorods obtained by thin-film technology

Physical electronics

Authors:

Shepeleva A.E. Gurin S.A. Novichkov M.D. Agafonov D.V. Pecherskaya E.A. Zuev V.D.

Abstract:

A method for manufacturing a gas-analytical multisensor chip is presented. The technological process of manufacturing with an additional SiO₂ layer is described. It was found
that the design of the experimental sample of the multisensor chip and the technology of synthesis of low-dimensional gas-sensitive layers provide sensitivity to detected gases up to 1 ppm and allow to increase the speed and temporal stability.