Sensor of fast-variable and static pressure

Experimental technique and devices
Authors:
Shepeleva Anastasia E. Gurin Sergey A. Ryzhov Alexandr A. Volkov Valentyn S. Agafonov Dmitriy V. Novichkov Maksim D.
Abstract:

A new design and technological solution has been developed for the sensing element of a static and rapid-change pressure sensor based on the integration of strain-resistant and piezoelectric films of nanometer size, which made it  possible to create a multifunctional sensor element with small pressure deviations from the actual values.