Localization microscopy of single photon emitters in locally strained monolayer semiconductor

Integration of single photon emitters with nanophotonic structures on a chip is key for the development of future quantum optoelectronic devices. Here we study the formation of single photon emitters in a WSe₂ monolayer by local nanoindentation with an atomic force microscope probe. Using the bichromatic photoluminescence-imaging approach, we define the spatial locations of single photon emitters with deep sub-wavelength accuracy.