Electrical potential distribution along the reactor with atmospheric pressure remote plasma

Experimental technique and devices
Authors:
Abstract:

The original design of electrical probe and the investigation techniques for ion flux characteristics have been developed. The measurements were carried out in the reactor equipped remote low temperature plasma generated by radio-frequency (RF) helium discharge (13.56 MHz) at atmospheric pressure. The experimental data on distributions of ion concentrations and electrical potential along the reactor, outside of the discharge gap were given.