SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
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Articles by keywords "electrostatic actuation"

A seesaw-type MEMS switch with Pt and Ru contacts

Radiophysics
Uvarov I.V. Naumov V.V. Kupriyanov A.N. Izyumov M.O. Amirov I.I.
  • Year: 2022
  • Volume: 15
  • Issue: 3.3
  • 17
  • 2395
  • Pages: 335-339