Research and development of a deposition synthesis technology for piezoelectric BaTiO3 thin films for use in sensors for dynamic and static pressures

The prospects for creating heterostructures based on ferroelectric materials have been studied. The most suitable technological parameters for forming these structures have been identified. A detailed analysis of the crystalline structure of the obtained ferroelectric films has been carried out. It has been established that at the moment of deposition, when creating thin-film multilayer systems with a temperature of the sensitive element (SE) above 700 °C, the perovskite layer loses its ferroelectric characteristics.