SPbPU Journal - Physics and Mathematics
    St. Petersburg Polytechnic University Journal: Physics and MathematicsPeter the Great St. Petersburg Polytechnic University
    Since 2008
    ISSN 2304-9782
    ISSN 2618-8686
    ISSN 2405-7223
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    Articles by keywords "scanning probe lithography"

    Scanning probe lithography implementation for InGaS3 optical waveguides fabrication

    Condensed matter physics
    Kusnetsov A.Borodin B.R.Toksumakov A.N.Ghazaryan D.A.Alekseev P.A.Bolshakov A.D.
    • Year: 2025
    • Volume: 18
    • Issue: 3.2
    • 14
    • 1410
    • Pages: 11-15

    Mechanical scanning probe lithography of van der Waals antiferromagnetic CrSBr for fabrication of high-index waveguides and resonators

    Physical optics
    Kalantaevskii I.E.Gorelkina T.D.Gasnikova K.A.Glebov N.V.Chernov A.Alekseev P.A.Kravtsov V.A.
    • Year: 2025
    • Volume: 18
    • Issue: 3.1
    • 17
    • 1364
    • Pages: 204-208