SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
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Articles by keywords "scanning probe lithography"

Scanning probe lithography implementation for InGaS3 optical waveguides fabrication

Condensed matter physics
Kusnetsov A. Borodin B.R. Toksumakov A.N. Ghazaryan D.A. Alekseev P.A. Bolshakov A.D.
  • Year: 2025
  • Volume: 18
  • Issue: 3.2
  • 0
  • 147
  • Pages: 11-15

Mechanical scanning probe lithography of van der Waals antiferromagnetic CrSBr for fabrication of high-index waveguides and resonators

Physical optics
Kalantaevskii I.E. Gorelkina T.D. Gasnikova K.A. Glebov N.V. Chernov A. Alekseev P.A. Kravtsov V.A.
  • Year: 2025
  • Volume: 18
  • Issue: 3.1
  • 2
  • 167
  • Pages: 204-208