SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
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Articles by keywords "gas-sensitive layer"

Technological process of manufacturing a gas-sensitive multisensor chip based on a passivating coating of zinc oxide nanorods obtained by thin-film technology

Physical electronics
Shepeleva A.E. Gurin S.A. Novichkov M.D. Agafonov D.V. Pecherskaya E.A. Zuev V.D.
  • Year: 2025
  • Volume: 18
  • Issue: 3.1
  • 0
  • 35
  • Pages: 187-190