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<!DOCTYPE article PUBLIC "-//NLM//DTD JATS (Z39.96) Journal Publishing DTD v1.3 20210610//EN" "https://jats.nlm.nih.gov/publishing/1.3/JATS-journalpublishing1-3.dtd">
<article article-type="meeting-report" dtd-version="1.3" xml:lang="en">
  <front xmlns:xlink="http://www.w3.org/1999/xlink">
    <journal-meta>
      <journal-title-group>
        <journal-title>St. Petersburg Polytechnic University Journal: Physics and Mathematics</journal-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Научно-технические ведомости СПбГПУ. Физико-математические науки</trans-title>
        </trans-title-group>
      </journal-title-group>
      <issn pub-type="epub">2304-9782, 2618-8686, 2405-7223</issn>
    </journal-meta>
    <article-meta xmlns:xlink="http://www.w3.org/1999/xlink">
      <article-id pub-id-type="publisher-id">33</article-id>
      <article-id pub-id-type="doi">10.18721/JPM.183.233</article-id>
      <title-group>
        <article-title>A compact MEMS switch based on a cantilever with three elastic elements</article-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Компактный МЭМС-переключатель на основе кантилевера с тремя упругими элементами</trans-title>
        </trans-title-group>
      </title-group>
      <contrib-group>
        <contrib contrib-type="author">
          <name>
            <surname>Belozerov</surname>
            <given-names>Igor</given-names>
          </name>
          <email>igas2580@yandex.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Uvarov</surname>
            <given-names>Ilia</given-names>
          </name>
          <email>i.v.uvarov@bk.ru</email>
        </contrib>
      </contrib-group>
      <pub-date publication-format="electronic" date-type="pub" iso-8601-date="2025-12-19">
        <day>19</day>
        <month>12</month>
        <year>2025</year>
      </pub-date>
      <volume>18</volume>
      <issue>3.2</issue>
      <fpage>168</fpage>
      <lpage>171</lpage>
      <self-uri xmlns:xlink="http://www.w3.org/1999/xlink" content-type="pdf" xlink:href="https://physmath.spbstu.ru/userfiles/files/articles/2025/3.2/33_168-171_18(3_2)2025.pdf"/>
      <abstract xml:lang="en">
        <p>MEMS switches are of significant interest for advanced radioelectronic systems. High RF performance combined with small size and low power consumption make them promising for use in phased array antennas, wireless communication devices and navigation systems. This paper presents a resistive switch based on a cantilever with three elastic elements. The pull-in voltage and contact resistance are measured, and the results are compared with the calculated values. The switch provides lower resistance than previous devices.</p>
      </abstract>
      <kwd-group xml:lang="en">
        <kwd>MEMS switch</kwd>
        <kwd>cantilever</kwd>
        <kwd>pull-in voltage</kwd>
        <kwd>contact resistance</kwd>
        <kwd>contact force</kwd>
      </kwd-group>
    </article-meta>
  </front>
</article>
