St. Petersburg Polytechnic University Journal: Physics and Mathematics

Научно-технические ведомости СПбГПУ. Физико-математические науки

2304-9782, 2618-8686, 2405-7223

10.18721/JPM.173.257

Effect of functional sublayers on the characteristics of deposited diamond-like carbon coatings

Влияние функциональных подслоев на характеристики напыляемых алмазоподобных углеродных покрытий

Parshin

Bogdan

parshbgal@bmstu.ru Makeev

Mstislav

m.makeev@bmstu.ru

0000-0003-0672-4627

Mikhalev

Pavel

pamikhalev@bmstu.ru Sviridyuk

Denis

sviridyuk@bmstu.ru

Bauman Moscow State Technical University

23 12 2024

17 3.2 283 287

DLC coatings deposited by the PLD method were investigated using Raman spectroscopy, spectrophotometry and atomic force microscopy. The influence of the material of the functional sublayers used (Ti, Cr) on the structural and optical characteristics, as well as the surface condition of the deposited DLC coatings, was studied.

diamond-like carbon functional sublayers sp2-hybridization sp3-hybridization atomic force microscopy spectrophotometry Raman spectroscopy