St. Petersburg Polytechnic University Journal: Physics and Mathematics Научно-технические ведомости СПбГПУ. Физико-математические науки 2304-9782, 2618-8686, 2405-7223 31 10.18721/JPM.173.231 Sensor of fast-variable and static pressure Датчик быстропеременного и статического давления 0009-0009-4548-3724 Agafonov Dmitriy 0000-0001-9319-2475 Novichkov Maksim Shepeleva Anastasia eduard.shepelev.67@mail.ru 0000-0001-9602-7221 Gurin Sergey 0009-0006-3140-5897 Ryzhov Alexandr Volkov Valentyn vsv.mipt@gmail.com Research Institute of Electronic and Mechanical Devices Moscow Institute of Physics and Technology (MIPT) 23 12 2024 17 3.2 157 160

A new design and technological solution has been developed for the sensing element of a static and rapid-change pressure sensor based on the integration of strain-resistant and piezoelectric films of nanometer size, which made it  possible to create a multifunctional sensor element with small pressure deviations from the actual values.

 sensing element pressure sensor strain gauge piezoelectric thin films static pressure dynamic pressure