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  <front xmlns:xlink="http://www.w3.org/1999/xlink">
    <journal-meta>
      <journal-title-group>
        <journal-title>St. Petersburg Polytechnic University Journal: Physics and Mathematics</journal-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Научно-технические ведомости СПбГПУ. Физико-математические науки</trans-title>
        </trans-title-group>
      </journal-title-group>
      <issn pub-type="epub">2304-9782, 2618-8686, 2405-7223</issn>
    </journal-meta>
    <article-meta xmlns:xlink="http://www.w3.org/1999/xlink">
      <article-id pub-id-type="publisher-id">47</article-id>
      <article-id pub-id-type="doi">10.18721/JPM.163.247</article-id>
      <title-group>
        <article-title>Boron phosphide grown by PECVD and its optical properties</article-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Плазмохимическое осаждение фосфида бора и его оптические свойства</trans-title>
        </trans-title-group>
      </title-group>
      <contrib-group>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0000-0002-3503-7458</contrib-id>
          <name>
            <surname>Maksimova</surname>
            <given-names>Alina A.</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
          <email>deer.blackgreen@yandex.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0000-0002-0061-6687</contrib-id>
          <name>
            <surname>Uvarov</surname>
            <given-names>Alexander</given-names>
          </name>
          <xref ref-type="aff" rid="aff2"/>
          <email>lumenlight@mail.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0009-0009-4023-6185</contrib-id>
          <name>
            <surname>Pozdeev</surname>
            <given-names>Vyacheslav</given-names>
          </name>
          <xref ref-type="aff" rid="aff2"/>
          <email>pozdeev99va@gmail.com</email>
        </contrib>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0000-0002-1571-209X</contrib-id>
          <name>
            <surname>Kirilenko</surname>
            <given-names>Demid</given-names>
          </name>
          <xref ref-type="aff" rid="aff3"/>
          <email>demid.kirilenko@mail.ioffe.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0000-0002-4894-6503</contrib-id>
          <name>
            <surname>Baranov</surname>
            <given-names>Artem I.</given-names>
          </name>
          <xref ref-type="aff" rid="aff2"/>
          <email>baranov_art@spbau.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0000-0001-6869-1213</contrib-id>
          <name>
            <surname>Vyacheslavova</surname>
            <given-names>Ekaterina</given-names>
          </name>
          <xref ref-type="aff" rid="aff2"/>
          <email>cate.viacheslavova@yandex.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0000-0002-7632-3194</contrib-id>
          <name>
            <surname>Gudovskikh</surname>
            <given-names>Alexander</given-names>
          </name>
          <xref ref-type="aff" rid="aff2"/>
          <email>gudovskikh@spbau.ru</email>
        </contrib>
      </contrib-group>
      <aff id="aff1">St. Petersburg Electrotechnical University "LETI"</aff>
      <aff id="aff2">Alferov University</aff>
      <aff id="aff3">ITMO University</aff>
      <pub-date publication-format="electronic" date-type="pub" iso-8601-date="2023-11-30">
        <day>30</day>
        <month>11</month>
        <year>2023</year>
      </pub-date>
      <volume>16</volume>
      <issue>3.2</issue>
      <fpage>273</fpage>
      <lpage>277</lpage>
      <self-uri xmlns:xlink="http://www.w3.org/1999/xlink" content-type="pdf" xlink:href="https://physmath.spbstu.ru/userfiles/files/articles/2023/3.2/47_273-277_16(3_2)2023.pdf"/>
      <abstract xml:lang="en">
        <p>This article presents a study of the growth of boron phosphide (BP) thin films by plasma enhanced chemical vapor deposition (PECVD) and its optical properties. BP thin films were deposited on a fused silica and silicon substrates using a mixture of diborane (B2H6) and phosphine (PH3) with hydrogen as precursors. The optical properties were investigated using optical spectroscopy, which showed excellent optical transparency in the visible and near-infrared regions. The BP films exhibited a bandgap of approximately 1.9 eV, indicating its potential for use in optoelectronic applications. The results demonstrate that PECVD is a promising technique for growing BP thin films with desirable optical properties.</p>
      </abstract>
      <kwd-group xml:lang="en">
        <kwd>boron phosphide</kwd>
        <kwd>PECVD</kwd>
        <kwd>plasma enhanced chemical vapor deposition</kwd>
        <kwd>optical spectroscopy</kwd>
      </kwd-group>
    </article-meta>
  </front>
</article>
