<?xml version="1.0" encoding="utf-8"?>
<!DOCTYPE article PUBLIC "-//NLM//DTD JATS (Z39.96) Journal Publishing DTD v1.3 20210610//EN" "https://jats.nlm.nih.gov/publishing/1.3/JATS-journalpublishing1-3.dtd">
<article article-type="meeting-report" dtd-version="1.3" xml:lang="en">
  <front xmlns:xlink="http://www.w3.org/1999/xlink">
    <journal-meta>
      <journal-title-group>
        <journal-title>St. Petersburg Polytechnic University Journal: Physics and Mathematics</journal-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Научно-технические ведомости СПбГПУ. Физико-математические науки</trans-title>
        </trans-title-group>
      </journal-title-group>
      <issn pub-type="epub">2304-9782, 2618-8686, 2405-7223</issn>
    </journal-meta>
    <article-meta xmlns:xlink="http://www.w3.org/1999/xlink">
      <article-id pub-id-type="publisher-id">80</article-id>
      <article-id pub-id-type="doi">10.18721/JPM.163.180</article-id>
      <title-group>
        <article-title>The effect of the dielectric SiO2 layer on the characteristics of visible-blind ultraviolet photodetectors based on ultrathin GaN epitaxial layers grown on c-Al2O3 substrates</article-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Влияние диэлектрического слоя SiO2 на характеристики видимо-слепых ультрафиолетовых фотодетекторов на основе ультратонких эпитаксиальных слоев GaN, выращенных на подложках c-Al2O3</trans-title>
        </trans-title-group>
      </title-group>
      <contrib-group>
        <contrib contrib-type="author">
          <name>
            <surname>Sinitskaya</surname>
            <given-names>Olesya</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
          <email>olesia-sova@mail.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0000-0003-1835-1629</contrib-id>
          <name>
            <surname>Shubina</surname>
            <given-names>Kseniia</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
          <email>rein.raus.2010@gmail.com</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Mokhov</surname>
            <given-names>Dmitry</given-names>
          </name>
          <email>mokhov@spbau.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0000-0002-0061-6687</contrib-id>
          <name>
            <surname>Uvarov</surname>
            <given-names>Alexander</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
          <email>lumenlight@mail.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Mizerov</surname>
            <given-names>Andrey</given-names>
          </name>
          <email>andreymizerov@rambler.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Nikitina</surname>
            <given-names>Ekaterina</given-names>
          </name>
          <email>mail.nikitina@mail.ru</email>
        </contrib>
      </contrib-group>
      <aff id="aff1">Alferov University</aff>
      <pub-date publication-format="electronic" date-type="pub" iso-8601-date="2023-11-29">
        <day>29</day>
        <month>11</month>
        <year>2023</year>
      </pub-date>
      <volume>16</volume>
      <issue>3.1</issue>
      <fpage>439</fpage>
      <lpage>443</lpage>
      <self-uri xmlns:xlink="http://www.w3.org/1999/xlink" content-type="pdf" xlink:href="https://physmath.spbstu.ru/userfiles/files/articles/2023/3.1/80_439-443_16(3_1)2023.pdf"/>
      <abstract xml:lang="en">
        <p>In this work ultraviolet metal-semiconductor-metal and metal-insulator-semiconductor photodetectors based on GaN epitaxial layers were fabricated. N-polar GaN epitaxial layers were synthesized by plasma-assisted molecular beam epitaxy on nitrided sapphire substrates. To form Schottky barrier contacts a Ni/Au metallization was chosen. SiO2 layers were deposited by plasma enhanced chemical vapor deposition. I–V characteristics of fabricated photodetectors were studied. It was found that the dark current of the photodetectors decreased by 49 times after introducing a 20 nm thick SiO2 dielectric layer, and the photocurrent to dark current ratio increased by a maximum of 35 times.</p>
      </abstract>
      <kwd-group xml:lang="en">
        <kwd>GaN</kwd>
        <kwd>SiO2</kwd>
        <kwd>ultraviolet photodetector</kwd>
        <kwd>metal-semiconductor-metal</kwd>
        <kwd>metal-insulator-semiconductor</kwd>
      </kwd-group>
    </article-meta>
  </front>
</article>
