<?xml version="1.0" encoding="utf-8"?>
<!DOCTYPE article PUBLIC "-//NLM//DTD JATS (Z39.96) Journal Publishing DTD v1.3 20210610//EN" "https://jats.nlm.nih.gov/publishing/1.3/JATS-journalpublishing1-3.dtd">
<article article-type="meeting-report" dtd-version="1.3" xml:lang="en">
  <front xmlns:xlink="http://www.w3.org/1999/xlink">
    <journal-meta>
      <journal-title-group>
        <journal-title>St. Petersburg Polytechnic University Journal: Physics and Mathematics</journal-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Научно-технические ведомости СПбГПУ. Физико-математические науки</trans-title>
        </trans-title-group>
      </journal-title-group>
      <issn pub-type="epub">2304-9782, 2618-8686, 2405-7223</issn>
    </journal-meta>
    <article-meta xmlns:xlink="http://www.w3.org/1999/xlink">
      <article-id pub-id-type="publisher-id">64</article-id>
      <article-id pub-id-type="doi">10.18721/JPM.161.164</article-id>
      <title-group>
        <article-title>2DEG-based multilayer AlGaN/GaN heterostructures with lowered sheet resistance</article-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Многослойные AlGaN/GaN гетероструктуры с низким слоевым сопротивлением на основе двумерного электронного газа</trans-title>
        </trans-title-group>
      </title-group>
      <contrib-group>
        <contrib contrib-type="author">
          <name>
            <surname>Arteev</surname>
            <given-names>Dmitri</given-names>
          </name>
          <email>ArteevDS@mail.ioffe.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Sakharov</surname>
            <given-names>Alexey</given-names>
          </name>
          <email>val@beam.ioffe.rssi.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Nikolaev</surname>
            <given-names>Andrei</given-names>
          </name>
          <email>Aen@mail.ioffe.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Zavarin</surname>
            <given-names>Evgenii</given-names>
          </name>
          <email>EZavarin@mail.ioffe.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Tsatsulnikov</surname>
            <given-names>Andrey</given-names>
          </name>
          <email>andrew@beam.ioffe.ru</email>
        </contrib>
      </contrib-group>
      <pub-date publication-format="electronic" date-type="pub" iso-8601-date="2023-04-30">
        <day>30</day>
        <month>04</month>
        <year>2023</year>
      </pub-date>
      <volume>16</volume>
      <issue>1.1</issue>
      <fpage>380</fpage>
      <lpage>384</lpage>
      <self-uri xmlns:xlink="http://www.w3.org/1999/xlink" content-type="pdf" xlink:href="https://physmath.spbstu.ru/userfiles/files/articles/2023/1.1/64_380-384_16(1_1)2023.pdf"/>
      <abstract xml:lang="en">
        <p>The influence of n-type doping of the AlGaN barrier layer in AlGaN/AlN/GaN single- and triple-channel heterostructures on their electrical properties was studied. It was found that the optimal thickness of i-AlGaN spacer is 3 nm, and  the Si concentration in n-AlGaN is 7·1018 cm-3. The lowest predicted sheet resistance at room temperature for the triple-channel structure of the optimal design is ~ 90 Ω sq-1, three times lower than that of the single-channel  structure.</p>
      </abstract>
      <kwd-group xml:lang="en">
        <kwd>GaN</kwd>
        <kwd>AlGaN</kwd>
        <kwd>HEMT</kwd>
        <kwd>2DEG</kwd>
        <kwd>multichannel</kwd>
      </kwd-group>
    </article-meta>
  </front>
</article>
