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<!DOCTYPE article PUBLIC "-//NLM//DTD JATS (Z39.96) Journal Publishing DTD v1.3 20210610//EN" "https://jats.nlm.nih.gov/publishing/1.3/JATS-journalpublishing1-3.dtd">
<article article-type="meeting-report" dtd-version="1.3" xml:lang="en">
  <front xmlns:xlink="http://www.w3.org/1999/xlink">
    <journal-meta>
      <journal-title-group>
        <journal-title>St. Petersburg Polytechnic University Journal: Physics and Mathematics</journal-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Научно-технические ведомости СПбГПУ. Физико-математические науки</trans-title>
        </trans-title-group>
      </journal-title-group>
      <issn pub-type="epub">2304-9782, 2618-8686, 2405-7223</issn>
    </journal-meta>
    <article-meta xmlns:xlink="http://www.w3.org/1999/xlink">
      <article-id pub-id-type="publisher-id">74</article-id>
      <article-id pub-id-type="doi">10.18721/JPM.153.374</article-id>
      <title-group>
        <article-title>Fabrication of a micropump based on the fast electrochemical actuator with the PDMS membrane</article-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Изготовление микронасоса на основе быстрого электрохимического актюатора с ПДМС-мембраной</trans-title>
        </trans-title-group>
      </title-group>
      <contrib-group>
        <contrib contrib-type="author">
          <name>
            <surname>Uvarov</surname>
            <given-names>Ilia</given-names>
          </name>
          <email>i.v.uvarov@bk.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Shlepakov</surname>
            <given-names>Pavel</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
          <email>p.shlepakov@bk.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Abramychev</surname>
            <given-names>Andrey</given-names>
          </name>
          <email>irumiantsieva@bk.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Svetovoy</surname>
            <given-names>Vitaliy</given-names>
          </name>
          <email>svetovoy@yandex.ru</email>
        </contrib>
      </contrib-group>
      <aff id="aff1">Federal State Budgetary Institution of Science K.A. Valiev Institute of Physics and Technology of the RAS Yaroslavl Branch</aff>
      <pub-date publication-format="electronic" date-type="pub" iso-8601-date="2022-12-23">
        <day>23</day>
        <month>12</month>
        <year>2022</year>
      </pub-date>
      <volume>15</volume>
      <issue>3.3</issue>
      <fpage>376</fpage>
      <lpage>380</lpage>
      <self-uri xmlns:xlink="http://www.w3.org/1999/xlink" content-type="pdf" xlink:href="https://physmath.spbstu.ru/userfiles/files/articles/2022/3.3/74_3_3_15_2022_376-380.pdf"/>
      <abstract xml:lang="en">
        <p>Microfluidic systems can deliver drugs to a human body in small accurate doses. For this purpose, they have to be equipped by a compact, energy-efficient and microtechnology-compatible pump. A recently proposed micropump based on the fast electrochemical actuator meets these requirements. It contains three actuators operating in a peristaltic manner. The first version of the pump was not completely functional due to the shortcomings of the fabrication process. In this work, we proposed a modified technological route. The flexible membranes of the actuators are made of polydimethylsiloxane (PDMS) instead of SiNx, which increases the fabrication yield. The route includes the  formation of the PDMS membrane on a polyester film and two steps of bonding of the membrane to a photoresist SU-8, which are the most critical operations. Details of the fabrication process are reported and optimal bonding
conditions are found.</p>
      </abstract>
      <kwd-group xml:lang="en">
        <kwd>microfluidics</kwd>
        <kwd>micropump</kwd>
        <kwd>electrochemical actuator</kwd>
        <kwd>nanobubbles</kwd>
        <kwd>bonding</kwd>
      </kwd-group>
    </article-meta>
  </front>
</article>
