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<!DOCTYPE article PUBLIC "-//NLM//DTD JATS (Z39.96) Journal Publishing DTD v1.3 20210610//EN" "https://jats.nlm.nih.gov/publishing/1.3/JATS-journalpublishing1-3.dtd">
<article article-type="meeting-report" dtd-version="1.3" xml:lang="en">
  <front xmlns:xlink="http://www.w3.org/1999/xlink">
    <journal-meta>
      <journal-title-group>
        <journal-title>St. Petersburg Polytechnic University Journal: Physics and Mathematics</journal-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Научно-технические ведомости СПбГПУ. Физико-математические науки</trans-title>
        </trans-title-group>
      </journal-title-group>
      <issn pub-type="epub">2304-9782, 2618-8686, 2405-7223</issn>
    </journal-meta>
    <article-meta xmlns:xlink="http://www.w3.org/1999/xlink">
      <article-id pub-id-type="publisher-id">28</article-id>
      <article-id pub-id-type="doi">10.18721/JPM.153.328</article-id>
      <title-group>
        <article-title>Low-induction integral heater for temperature control of MEMS vapor cell</article-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Малоиндукционный интегральный нагреватель для термостатирования МЭМС газовой ячейки</trans-title>
        </trans-title-group>
      </title-group>
      <contrib-group>
        <contrib contrib-type="author">
          <name>
            <surname>Kenesbay</surname>
            <given-names>Ramazan</given-names>
          </name>
          <email>ramazan.kenesbay.1999@gmail.com</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Enns</surname>
            <given-names>Yakov</given-names>
          </name>
          <email>ennsjb@gmail.com</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Kazakin</surname>
            <given-names>Aleksey</given-names>
          </name>
          <email>keha@newmail.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Kleimanov</surname>
            <given-names>Roman</given-names>
          </name>
          <email>kleimanovrv@mail.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Akulshin</surname>
            <given-names>Yurie</given-names>
          </name>
          <email>acul@mems.ru</email>
        </contrib>
      </contrib-group>
      <pub-date publication-format="electronic" date-type="pub" iso-8601-date="2022-12-23">
        <day>23</day>
        <month>12</month>
        <year>2022</year>
      </pub-date>
      <volume>15</volume>
      <issue>3.3</issue>
      <fpage>147</fpage>
      <lpage>150</lpage>
      <self-uri xmlns:xlink="http://www.w3.org/1999/xlink" content-type="pdf" xlink:href="https://physmath.spbstu.ru/userfiles/files/articles/2022/3.3/28_3_3_15_2022_147-150.pdf"/>
      <abstract xml:lang="en">
        <p>This paper describes a solution to the problem of temperature control and the occurrence of a magnetic field created by a resistive heater in a gas cell of an atomic clock. A low-induction integral heater was developed in the form of a two-layer metallization system that mutually compensates for each other's magnetic fields. Numerical simulation was carried out, based on the results of which a prototype of a low-induction integral heater was developed using precision photolithography and technologies for applying thin-film conductive and dielectric coatings. Static and dynamic tests of the fabricated integral heater were carried out.</p>
      </abstract>
      <kwd-group xml:lang="en">
        <kwd>integral heater</kwd>
        <kwd>MEMS</kwd>
        <kwd>vapor cell</kwd>
      </kwd-group>
    </article-meta>
  </front>
</article>
