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<!DOCTYPE article PUBLIC "-//NLM//DTD JATS (Z39.96) Journal Publishing DTD v1.3 20210610//EN" "https://jats.nlm.nih.gov/publishing/1.3/JATS-journalpublishing1-3.dtd">
<article article-type="research-article" dtd-version="1.3" xml:lang="en">
  <front>
    <journal-meta>
      <journal-title-group>
        <journal-title>St. Petersburg Polytechnic University Journal: Physics and Mathematics</journal-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Научно-технические ведомости СПбГПУ. Физико-математические науки</trans-title>
        </trans-title-group>
      </journal-title-group>
      <issn pub-type="epub">2304-9782, 2618-8686, 2405-7223</issn>
    </journal-meta>
    <article-meta>
      <article-id pub-id-type="publisher-id">2</article-id>
      <title-group>
        <article-title>Growth modes of HVPE gallium nitride films</article-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Режимы роста нитрида галлия при хлоридгидридной газофазной эпитаксии</trans-title>
        </trans-title-group>
      </title-group>
      <contrib-group>
        <contrib contrib-type="author">
          <name>
            <surname>Tsyuk</surname>
            <given-names>Alexander</given-names>
          </name>
          <email>a.tsyuk@gmail.com</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Voronenkov</surname>
            <given-names>Vladislav</given-names>
          </name>
          <email>vladvoronenkov@yandex.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Gorbunov</surname>
            <given-names>Ruslan</given-names>
          </name>
          <email>merlinkun@yandex.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Latyshev</surname>
            <given-names>Philipp</given-names>
          </name>
          <email>philipp.latyshev@flll281.spb.edu</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Bochkareva</surname>
            <given-names>Nataliya</given-names>
          </name>
          <email>n.bochkareva@mail.ioffe.ru</email>
        </contrib>
      </contrib-group>
      <pub-date publication-format="electronic" date-type="pub" iso-8601-date="2011-09-10">
        <day>10</day>
        <month>09</month>
        <year>2011</year>
      </pub-date>
      <issue>3</issue>
      <issue-id pub-id-type="publisher-id">129</issue-id>
      <fpage>10</fpage>
      <lpage>13</lpage>
      <abstract xml:lang="en">
        <p>The effect of growth parameters on stress in thick GaN films grown on sapphire by HVPE method has been investigated. We have found two modes of growth with different growth stress. Films grown in one mode have rough surfaces and low stress. The second mode leads to smooth surfaces but the films contain many cracks due to high growth stress. A combination of these modes allows growth of films without cracks and with smooth surfaces.</p>
      </abstract>
      <kwd-group xml:lang="en">
        <kwd>HVPE</kwd>
        <kwd>gallium nitride</kwd>
        <kwd>growth modes</kwd>
        <kwd>morphology</kwd>
        <kwd>growth stress</kwd>
        <kwd>crack</kwd>
        <kwd>surface</kwd>
        <kwd>film</kwd>
      </kwd-group>
    </article-meta>
  </front>
</article>
