Combined resistive-capacitive MEMS switch for advanced communication systems

The main characteristic of a capacitive microelectromechanical system (MEMS) switch is the ratio of capacitances in the open and closed states. In conventional switches, this ratio typically does not exceed ten and can be increased  several times by using a floating potential electrode. The dependence of the capacitive characteristics, isolation and insertion loss of a switch with the “floating” electrode on the substrate material is investigated.