A compact MEMS switch for advanced radar systems
Authors:
Abstract:
MEMS switches are promising candidates for use in advanced radioelectronic systems. High RF performance combined with small size and low power consumption make them attractive for phased array antennas, aviation and space equipment. This work presents a switch based on a tiny cantilever with a length of 50 μm. Its working characteristics are compared with the calculation results. The advantages of the switch in comparison with previously developed products are demonstrated.