<?xml version="1.0" encoding="utf-8"?>
<!DOCTYPE article PUBLIC "-//NLM//DTD JATS (Z39.96) Journal Publishing DTD v1.3 20210610//EN" "https://jats.nlm.nih.gov/publishing/1.3/JATS-journalpublishing1-3.dtd">
<article article-type="meeting-report" dtd-version="1.3" xml:lang="ru">
  <front>
    <journal-meta>
      <journal-title-group>
        <journal-title>St. Petersburg Polytechnic University Journal: Physics and Mathematics</journal-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Научно-технические ведомости СПбГПУ. Физико-математические науки</trans-title>
        </trans-title-group>
      </journal-title-group>
      <issn pub-type="epub">2304-9782, 2618-8686, 2405-7223</issn>
    </journal-meta>
    <article-meta>
      <article-id pub-id-type="publisher-id">1</article-id>
      <article-id pub-id-type="doi">10.18721/JPM.183.201</article-id>
      <title-group>
        <article-title>Scanning probe lithography implementation for InGaS3 optical waveguides fabrication</article-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Применение сканирующей зондовой литографии для создания оптических волноводов на основе InGaS3</trans-title>
        </trans-title-group>
      </title-group>
      <contrib-group>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0000-0001-7143-6686</contrib-id>
          <name>
            <surname>Kusnetsov</surname>
            <given-names>Alexey</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
          <email>alkuznetsov1998@gmail.com</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Borodin</surname>
            <given-names>Bogdan</given-names>
          </name>
          <email>brborodin@gmail.com</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Toksumakov</surname>
            <given-names>Adilet</given-names>
          </name>
          <email>adilet.toksumakov@phystech.edu</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Ghazaryan</surname>
            <given-names>Davit</given-names>
          </name>
          <email>dav280892@gmail.com</email>
        </contrib>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0000-0002-8143-4606</contrib-id>
          <name>
            <surname>Alekseev</surname>
            <given-names>Prokhor</given-names>
          </name>
        </contrib>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0000-0001-7223-7232</contrib-id>
          <name>
            <surname>Bolshakov</surname>
            <given-names>Alexey</given-names>
          </name>
          <xref ref-type="aff" rid="aff2"/>
          <email>acr1235@mail.ru</email>
        </contrib>
      </contrib-group>
      <aff id="aff1">Московский физико-технический институт (МФТИ)</aff>
      <aff id="aff2">Moscow Institute of Physics and Technology (National Research University)</aff>
      <pub-date publication-format="electronic" date-type="pub" iso-8601-date="2025-12-19">
        <day>19</day>
        <month>12</month>
        <year>2025</year>
      </pub-date>
      <volume>18</volume>
      <issue>3.2</issue>
      <fpage>11</fpage>
      <lpage>15</lpage>
      <abstract xml:lang="en">
        <p>Integrated nanophotonics faces challenges in matching the component density of electronics, largely due to the size limitations of silicon-based photonics. High-refractiveindex materials like InGaS3 offer a promising solution for miniaturized visible/UV photonic circuits. This study demonstrates the fabrication of InGaS3 waveguides using mechanical scanning probe lithography (m-SPL), overcoming limitations of conventional lithography techniques. Test cutting in various directions shows that m-SPL trench quality in InGaS3 depends on crystallographic orientation, with zigzag-aligned force producing clean edges while jagged armchair-direction leads to fractures. The method allows to simultaneously determine crystallographic axes and optimize waveguides side walls quality. This approach establishes m-SPL as a viable route for nanostructuring unconventional materials where standard etching protocols fail, advancing high density integrated photonics.</p>
      </abstract>
      <kwd-group xml:lang="en">
        <kwd>InGaS3</kwd>
        <kwd>scanning probe lithography</kwd>
        <kwd>waveguides</kwd>
      </kwd-group>
    </article-meta>
  </front>
</article>
