The article presents studies of the physical patterns of formation of oxide coatings on aluminum substrates by microarc oxidation. Correlation dependences of the influence of technological modes, such as current density and time, on the properties of microarc oxidation coatings have been established. A method for monitoring the quality parameters of formed oxide coatings in real time is proposed, based on the analysis of the deviation of the voltage–time curves from the traditional piecewise linear form. The results of the study can be used in the development of intelligent algorithms for creating a digital twin of the microarc oxidation process.