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<!DOCTYPE article PUBLIC "-//NLM//DTD JATS (Z39.96) Journal Publishing DTD v1.3 20210610//EN" "https://jats.nlm.nih.gov/publishing/1.3/JATS-journalpublishing1-3.dtd">
<article article-type="meeting-report" dtd-version="1.3" xml:lang="ru">
  <front>
    <journal-meta>
      <journal-title-group>
        <journal-title>St. Petersburg Polytechnic University Journal: Physics and Mathematics</journal-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Научно-технические ведомости СПбГПУ. Физико-математические науки</trans-title>
        </trans-title-group>
      </journal-title-group>
      <issn pub-type="epub">2304-9782, 2618-8686, 2405-7223</issn>
    </journal-meta>
    <article-meta>
      <article-id pub-id-type="publisher-id">31</article-id>
      <article-id pub-id-type="doi">10.18721/JPM.183.131</article-id>
      <title-group>
        <article-title>Metamaterials formed on the surface of silicon carbide by plasma treatment</article-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Формирование метаматериалов на поверхности карбида кремния методом плазменной обработки</trans-title>
        </trans-title-group>
      </title-group>
      <contrib-group>
        <contrib contrib-type="author">
          <name>
            <surname>Klimin</surname>
            <given-names>Viktor</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
          <email>kliminvs@sfedu.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0000-0001-9326-2349</contrib-id>
          <name>
            <surname>Demyanenko</surname>
            <given-names>Alexander</given-names>
          </name>
        </contrib>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0000-0002-6923-7917</contrib-id>
          <name>
            <surname>Bobkov</surname>
            <given-names>Ivan</given-names>
          </name>
        </contrib>
      </contrib-group>
      <aff id="aff1">Southern Federal University</aff>
      <pub-date publication-format="electronic" date-type="pub" iso-8601-date="2025-12-10">
        <day>10</day>
        <month>12</month>
        <year>2025</year>
      </pub-date>
      <volume>18</volume>
      <issue>3.1</issue>
      <fpage>161</fpage>
      <lpage>164</lpage>
      <abstract xml:lang="en">
        <p>In the presented work, a unit cell of a self-complementary metamaterial was designed, which is alternating patches and holes in a conductive graphene-like layer 7 μm thick on a silicon carbide substrate 250 μm thick. The results of a numerical study of the developed structure are presented. The calculations considered the conductivity of the graphene-like film, as well as the dielectric parameters of the silicon carbide substrate. The developed metamaterial is designed to convert circular polarization into linear; the central operating frequency of the resulting structure is 10 GHz. The dimensions of the unit cell are 2.8 mm × 5.6 mm. The elements obtained can be used in microwave technology and antenna structures. For the manufacture of structures, it is planned to use the method of plasma-chemical etching of silicon carbide in a fluorine-containing gas environment, which destroys the silicon component and leaves a graphene-like conductive layer on the surface. The thickness of the graphene-like layer depends on the power of the inductively coupled plasma source and the processing time; in this work, a thickness of 7 µm was taken, obtained at 800 W and 8.5 minutes of etching SiC in an SF6/Ar atmosphere.</p>
      </abstract>
      <kwd-group xml:lang="en">
        <kwd>plasma etching</kwd>
        <kwd>metamaterials</kwd>
        <kwd>graphene-like film</kwd>
        <kwd>silicon carbide</kwd>
        <kwd>microelectronics</kwd>
      </kwd-group>
    </article-meta>
  </front>
</article>
