The influence of the angle of incidence of the light flux on the photovoltaic performance of two types a-Si:H/c-Si heterojunction solar cells is investigated: KOH textured with a pyramidal surface, and black silicon with a nanostructured  surface. Current-voltage characteristics and power depending on the angle of incidence of the solar flux – from 14 mW/cm2 to 3 mW/cm2 for pyramidal surface and from 9 mW/cm2 to 2 mW/cm2 for black silicon in the angle range 0–75° were obtained. Solar cell based on black silicon retains its characteristics 6% better as the angle of incidence of light increases to 75°.