In the paper, the effect of bombardment with Ar+ ions on the composition, electronic and crystal structure of the surface layers of bulk single crystal samples and CdF2(111) films has been studied using the methods of Auger electron and ultraviolet photoelectron spectroscopy, high-energy electron diffraction and recording the angular dependences of the reflectance factor of inelastically reflected electrons. The effect of this bombardment on the density of states of valence electrons and energy band parameters of CdF2 was investigated for the first time. The degree of disorder of CdF2 into components and evaporation of fluorine from the surface layers was established to depend on the energy and dose of Ar+ ions. The complete evaporation of F in the form of a diatomic gas was shown for the first time to be observed in the energy range of 1 – 2 keV at a saturation dose.