Among semiconductors based on transition metal oxides, vanadium pentoxide has generated considerable interest in recent decades due to its wide range of applications. The physical properties of the films depend on certain parameters, such as the level and ratio of dopants, substrate temperature, deposition conditions, heat treatment, substrate material. In this study, it was found that increasing the substrate temperature resulted in an increase in the transparency of the films; as the temperature increased, the microstructure of the film became thinner, leading to an increase in the refractive index; reducing structural defects decreased the extinction coefficient of the films.