<?xml version="1.0" encoding="utf-8"?>
<!DOCTYPE article PUBLIC "-//NLM//DTD JATS (Z39.96) Journal Publishing DTD v1.3 20210610//EN" "https://jats.nlm.nih.gov/publishing/1.3/JATS-journalpublishing1-3.dtd">
<article article-type="meeting-report" dtd-version="1.3" xml:lang="ru">
  <front>
    <journal-meta>
      <journal-title-group>
        <journal-title>St. Petersburg Polytechnic University Journal: Physics and Mathematics</journal-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Научно-технические ведомости СПбГПУ. Физико-математические науки</trans-title>
        </trans-title-group>
      </journal-title-group>
      <issn pub-type="epub">2304-9782, 2618-8686, 2405-7223</issn>
    </journal-meta>
    <article-meta>
      <article-id pub-id-type="publisher-id">18</article-id>
      <article-id pub-id-type="doi">10.18721/JPM.163.118</article-id>
      <title-group>
        <article-title>A change in the morphology of multilayer porous silicon with a stepwise decrease in the etching current density</article-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Изменение морфологии многослойного пористого кремния при ступенчатом уменьшении плотности тока травления</trans-title>
        </trans-title-group>
      </title-group>
      <contrib-group>
        <contrib contrib-type="author">
          <name>
            <surname>Lenshin</surname>
            <given-names>Alexander</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
          <email>lenshinas@mail.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Peshkov</surname>
            <given-names>Yaroslav</given-names>
          </name>
          <xref ref-type="aff" rid="aff2"/>
          <email>tangar77@mail.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Chernousova</surname>
            <given-names>Olga</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
          <email>byolval@mail.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Kannykin</surname>
            <given-names>Sergey</given-names>
          </name>
          <xref ref-type="aff" rid="aff2"/>
          <email>svkannykin@gmail.com</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Grechkina</surname>
            <given-names>Margarita</given-names>
          </name>
          <xref ref-type="aff" rid="aff2"/>
          <email>grechkina_m@mail.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0000-0002-3956-196X</contrib-id>
          <name>
            <surname>Minakov</surname>
            <given-names>Dmitriy</given-names>
          </name>
          <xref ref-type="aff" rid="aff2"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Zolotukhin</surname>
            <given-names>Dmitriy</given-names>
          </name>
          <xref ref-type="aff" rid="aff2"/>
          <email>zolotuhin@phys.vsu.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Agapov</surname>
            <given-names>Boris</given-names>
          </name>
          <xref ref-type="aff" rid="aff2"/>
          <email>b.agapov2010@yandex.ru</email>
        </contrib>
      </contrib-group>
      <aff id="aff1">Voronezh State University of Engineering Technology</aff>
      <aff id="aff2">Voronezh State University</aff>
      <pub-date publication-format="electronic" date-type="pub" iso-8601-date="2023-11-29">
        <day>29</day>
        <month>11</month>
        <year>2023</year>
      </pub-date>
      <volume>16</volume>
      <issue>3.1</issue>
      <fpage>100</fpage>
      <lpage>105</lpage>
      <abstract xml:lang="en">
        <p>We present an experimental study of multilayer porous silicon formed by electrochemical etching. Special emphasis is placed on effects that arise from a stepwise decrease in the current density while maintaining the total etching time. In order to provide a fully understanding of the morphology of the surface, we used scanning electron and atomic force microscopy. X-ray reflectivity was used to assess the porosity of porous layers. It was found that a stepwise decrease in the current density leads to the formation of a two-layer structure without changing the porosity of the base bottom layer. However, the porosity of the top layer can be varied over a wide range, which directly affects the photoluminescence of the samples. Our results show how the sample production conditions affect the fine tuning of the surface layer morphology of multilayer porous silicon.</p>
      </abstract>
      <kwd-group xml:lang="en">
        <kwd>porous silicon</kwd>
        <kwd>multilayer nanostructures</kwd>
        <kwd>X-ray reflectivity</kwd>
        <kwd>surface morphology</kwd>
      </kwd-group>
    </article-meta>
  </front>
</article>
