Here, experimental studies on barium titanate nanocrystalline thin films fabricated by pulsed laser deposition and the influence of the oxygen pressure on the morphological parameters are presented. The average grain size changes from (20.1±1.8) nm to (88.2±7.9) nm with increasing oxygen pressure from 1×10‒5 Torr to 1×10‒2 Torr. The effect of plasma treatment on the parameters of BaTiO3 nanocrystalline thin films was studied. It was found that the formation of whisker-like structures is preferred for BaTiO3 when the power of inductively coupled and capacitive plasma sources increases. The results can be applied to the design and development of technological processes for promising lead-free energy converters, eco-friendly energy devices and memristive structures developed based on pulsed laser deposition.