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<!DOCTYPE article PUBLIC "-//NLM//DTD JATS (Z39.96) Journal Publishing DTD v1.3 20210610//EN" "https://jats.nlm.nih.gov/publishing/1.3/JATS-journalpublishing1-3.dtd">
<article article-type="research-article" dtd-version="1.3" xml:lang="ru">
  <front>
    <journal-meta>
      <journal-title-group>
        <journal-title>St. Petersburg Polytechnic University Journal: Physics and Mathematics</journal-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Научно-технические ведомости СПбГПУ. Физико-математические науки</trans-title>
        </trans-title-group>
      </journal-title-group>
      <issn pub-type="epub">2304-9782, 2618-8686, 2405-7223</issn>
    </journal-meta>
    <article-meta>
      <article-id pub-id-type="publisher-id">3</article-id>
      <title-group>
        <article-title>The Casimir force pressure onthe dielectric layer in nanoscale solid-state multilayer Al - SiO2 - Si structures</article-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Давление силы Казимира на слой диэлектрика в наноразмерных слоистых твердотельных структурах алюминий - оксид кремния - кремний</trans-title>
        </trans-title-group>
      </title-group>
      <contrib-group>
        <contrib contrib-type="author">
          <name>
            <surname>Yurova</surname>
            <given-names>Valentina</given-names>
          </name>
          <email>va-yurova@mail.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Fedortsov</surname>
            <given-names>Alexander</given-names>
          </name>
          <email>vecher@nwpi.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Klimchitskaya</surname>
            <given-names>Galina</given-names>
          </name>
          <email>g_klimchitskaya@mail.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Churkin</surname>
            <given-names>Yuri</given-names>
          </name>
          <email>physics@nwpi.ru</email>
        </contrib>
      </contrib-group>
      <pub-date publication-format="electronic" date-type="pub" iso-8601-date="2012-09-10">
        <day>10</day>
        <month>09</month>
        <year>2012</year>
      </pub-date>
      <issue>3</issue>
      <issue-id pub-id-type="publisher-id">153</issue-id>
      <fpage>22</fpage>
      <lpage>28</lpage>
      <abstract xml:lang="en">
        <p>The calculation of the dispersion forces pressure value on the dielectric layer in solid-state multilayer Al - SiO2 - Sistructure widely used in electronic components production is presented. It is shown that the pressure increases sharply in the nanometer range of the dielectric thickness and at the thickness of 1 nm reaches the value of 8 MPa. The calculation results do not depend on the dielectric permittivity model of the structure matters.</p>
      </abstract>
      <kwd-group xml:lang="en">
        <kwd>dispersion force pressure</kwd>
        <kwd>Casimir effect</kwd>
        <kwd>metall - dielectric - semiconductor structure</kwd>
        <kwd>Lifshitz theory</kwd>
        <kwd>permittivity</kwd>
      </kwd-group>
    </article-meta>
  </front>
</article>
