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<!DOCTYPE article PUBLIC "-//NLM//DTD JATS (Z39.96) Journal Publishing DTD v1.3 20210610//EN" "https://jats.nlm.nih.gov/publishing/1.3/JATS-journalpublishing1-3.dtd">
<article article-type="research-article" dtd-version="1.3" xml:lang="ru">
  <front>
    <journal-meta>
      <journal-title-group>
        <journal-title>St. Petersburg Polytechnic University Journal: Physics and Mathematics</journal-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Научно-технические ведомости СПбГПУ. Физико-математические науки</trans-title>
        </trans-title-group>
      </journal-title-group>
      <issn pub-type="epub">2304-9782, 2618-8686, 2405-7223</issn>
    </journal-meta>
    <article-meta>
      <article-id pub-id-type="publisher-id">9</article-id>
      <title-group>
        <article-title>The influence of collision cascade density on GaN surface topography and surface shift under atomic and molecular ion bombardment</article-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Влияние плотности каскадов смещений на топографию и сдвиг поверхности нитрида галлия, облучаемого атомарными и молекулярными ионами</trans-title>
        </trans-title-group>
      </title-group>
      <contrib-group>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0000-0003-1770-1877</contrib-id>
          <name>
            <surname>Karabeshkin</surname>
            <given-names>Konstantin</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">https://orcid.org/0000-0003-2511-0188</contrib-id>
          <contrib-id contrib-id-type="scopus">10041592700</contrib-id>
          <contrib-id contrib-id-type="researcherid">P-6861-2015</contrib-id>
          <name>
            <surname>Karaseov</surname>
            <given-names>Platon</given-names>
          </name>
          <xref ref-type="aff" rid="aff2"/>
          <email>platon.karaseov@spbstu.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Belyakov</surname>
            <given-names>Vladimir</given-names>
          </name>
        </contrib>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0000-0002-3321-7797</contrib-id>
          <name>
            <surname>Arkhipov</surname>
            <given-names>Alexander</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
          <email>arkhipov@rphf.spbstu.ru</email>
        </contrib>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0000-0003-4933-9534</contrib-id>
          <name>
            <surname>Titov</surname>
            <given-names>Andrey</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
          <email>andrei.titov@rphf.spbstu.ru</email>
        </contrib>
      </contrib-group>
      <aff id="aff1">Peter the Great St. Petersburg Polytechnic University</aff>
      <aff id="aff2">Санкт-Петербургский политехнический университет Петра Великого</aff>
      <pub-date publication-format="electronic" date-type="pub" iso-8601-date="2012-06-10">
        <day>10</day>
        <month>06</month>
        <year>2012</year>
      </pub-date>
      <issue>2</issue>
      <issue-id pub-id-type="publisher-id">146</issue-id>
      <fpage>55</fpage>
      <lpage>61</lpage>
      <abstract xml:lang="en">
        <p>Effect of collision cascade density on GaN surface properties under molecular and atomic ion bombardment have been studied. At low level of cascade density swelling prevails sputtering. In the case of molecular ion irradiation, when cascade is high, sputtering is more effective than swelling. Threshold behavior of these phenomena is established and corresponding values are found. Physical reasons are suggested.</p>
      </abstract>
      <kwd-group xml:lang="en">
        <kwd>ion implantation</kwd>
        <kwd>molecular ions</kwd>
        <kwd>gallium nitride</kwd>
        <kwd>swelling</kwd>
        <kwd>sputtering</kwd>
        <kwd>surface topography</kwd>
        <kwd>molecular effect</kwd>
        <kwd>collision cascade</kwd>
      </kwd-group>
    </article-meta>
  </front>
</article>
